VERTICAL SUBSTRATE HOLDER

Described herein are apparatuses for holding a substrate in a near vertical position, wherein the design minimizes substrate sag while allowing the substrate to expand and contract under varying thermal conditions. The apparatus minimizes the stress on the substrate, preventing breakage of or damage to the substrate while it undergoes coating and other thermal processes. 本文说明用于将基板固持在接近垂直的位置中的设备，其中所述设计最小化基板下陷(substrate sag)，同时允许基板在变化的热条件下膨胀与收缩。设备最小化基板上的应力，在基板经受涂布与其他热处理的同时防止基板断裂或受损。