Locally doped solar cell and preparation method thereof

The invention discloses a preparation method of a locally doped solar cell. The preparation method comprises the steps of 1) prearranging and drying doping slurry: prearranging the doping slurry in aposition where a film is to be opened, contacting the doping slurry with a silicon base layer, and ca...

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Bibliographische Detailangaben
Hauptverfasser: ZHAO BAOXING, WEI QINGZHU, NI ZHICHUN, HU DANGPING, LI SAIHONG, HUO TINGTING, LIAN WEIFEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a preparation method of a locally doped solar cell. The preparation method comprises the steps of 1) prearranging and drying doping slurry: prearranging the doping slurry in aposition where a film is to be opened, contacting the doping slurry with a silicon base layer, and carrying out drying; 2) depositing a dielectric passivation film layer on the back surface of the silicon base layer; 3) carrying out laser ablation: carrying out ablation on the dielectric passivation film layer in a metallization region on the back surface of the silicon base layer by laser in a position as same as that of prearranging the doping slurry in the step 1); and 4) carrying out metallization: preparing a metal electrode through a metallization process. The invention provides the locally doped solar cell and the preparation method thereof. Before the dielectric passivation film layer is deposited on the back surface, the doping slurry is prearranged in the metallization region onthe back surface; and when