Multifunctional acoustic surface wave sensor and preparation method and application thereof

Provided in the invention is a method for preparing a multifunctional acoustic surface wave sensor. The method comprises steps: S1, preparing an SAW chip; S2, depositing a ZnO thin film; to be specific, depositing a nano-particle-shaped ZnO thin film with the size of 25 to 45 nm on the surface of the SAW chip by means of magnetron sputtering; and S3, carrying out PDMS packaging; to be specific, preparing a PDMS package block, opening a through hole in the center of the PDMS package block by using a drilling tool, enabling the PDMS package block to be in contact with the ZnO thin film, aligningthe through hole of the PDMS package block at a delay line area of the SAW chip, and realizing bonding of the PDMS package block and the ZnO film under the high vacuum pressure to obtain a multifunctional acoustic surface wave sensor. The preparation method is simple; the sensitive layer and the waveguide layer are protected from being polluted in the preparation process; and the prepared acoustic surface wave sensor is