Profiling polishing method of through type micro lens array workpiece

The invention discloses a profiling polishing method of a through type micro lens array workpiece. The profiling polishing method of the through type micro lens array workpiece comprises the followingsteps that step 1, a through type micro lens array structure with unit structures repeated k times i...

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Bibliographische Detailangaben
Hauptverfasser: LIU HANLIAN, ZHU HONGTAO, YU SHIMENG, ZHOU PEIFA, HUANG CHUANZHEN, ZOU BIN, YAO PENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a profiling polishing method of a through type micro lens array workpiece. The profiling polishing method of the through type micro lens array workpiece comprises the followingsteps that step 1, a through type micro lens array structure with unit structures repeated k times is machined, and the array unit can be an aspheric surface, a v-shaped shape, a cylindrical shape and the like; step 2, a wool polishing rod is cut by a processed array workpiece as a copying turning tool, and the array shape on the workpiece is replicated onto the wool rod; and step 3, the workpiece array unit is polished and processed again by the processed wool rod. The profiling polishing requires that the polishing rod profile is the same as the shape of the polished workpiece array, and the processing difficulty is large if the array shape polishing rod is processed by a common method. According to the profiling polishing method of the through type micro lens array workpiece, one section of the processed array