Conductive film and manufacturing method thereof

The invention relates to a conductive film and a manufacturing method thereof. The conductive film has a standard Kelvin guard ring structure and consists of a circular conductive film and an annularconductive film which are insulated and separated and concentric. The manufacturing method comprises...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG WEI, SHAO SHUFANG, WANG YINGXIAN, HE XIAOYE, ZHANG HAITING, LIN XINHUA, CAO YAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention relates to a conductive film and a manufacturing method thereof. The conductive film has a standard Kelvin guard ring structure and consists of a circular conductive film and an annularconductive film which are insulated and separated and concentric. The manufacturing method comprises the steps of: (1) using an insulating material with two through holes as a substrate, and filling the through holes with a conductive material by adopting a filling process; (2) polishing the surface of an insulating substrate filled with the conductive material in the through holes; and (3) manufacturing a conductive film with the standard Kelvin guard ring structure on the polished surface of the insulating substrate filled with the conductive material in the through holes by adopting a screen printing or film deposition process, enabling the circular conductive film to be connected with the conductive material in one through hole, and enabling the annular conductive film to be connectedwith the conductive materi