Holder for substrates

A holder configured to be attached to a carrier body for holding a substrate is described. The holder includes a front portion arranged to face a material source or a mask; a rear portion arranged toface away from a material source, wherein the rear portion includes a beveled portion with an incline...

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Bibliographische Detailangaben
Hauptverfasser:	LAU SIMON, WURSTER HARALD, ULLMANN OLIVER, LINDENBERG RALPH, ZENGEL CLAUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL GLASS HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A holder configured to be attached to a carrier body for holding a substrate is described. The holder includes a front portion arranged to face a material source or a mask; a rear portion arranged toface away from a material source, wherein the rear portion includes a beveled portion with an inclined surface; and a groove for receiving a substrate provided between the front portion and the rear portion. 描述一种配置成附接到用于保持基板的载具主体的保持器。保持器包括：布置成面对材料源或掩模的前部；布置成背离材料源的后部，其中后部包括具有倾斜表面的斜面部分；和用于接收设置在前部和后部之间的基板的凹槽。