Superstrate and a method of using the same
A superstrate and a method of using the same are provided. A body of the superstrate can be used to form an adaptive planarization layer over a substrate that has a non-uniform topography. The body ofa superstrate can have bending characteristics that are well suited to achieve both conformal and pl...
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Format: | Patent |
Sprache: | chi ; eng |
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