Superstrate and a method of using the same

A superstrate and a method of using the same are provided. A body of the superstrate can be used to form an adaptive planarization layer over a substrate that has a non-uniform topography. The body ofa superstrate can have bending characteristics that are well suited to achieve both conformal and pl...

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Bibliographische Detailangaben
Hauptverfasser: KHUSNATDINOV NIYAZ, LABRAKE DWAYNE L
Format: Patent
Sprache:chi ; eng
Schlagworte:
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