HYBRID LIFT PIN

A lift pin and a substrate support assembly and reactor including the lift pin are disclosed. The lift pin includes first section comprising a material having a first transparency and a second sectioncomprising a material having a second transparency. The lift pin can provide improved temperature un...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROKKAM UDAY KIRAN, HILL ERIC
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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