HYBRID LIFT PIN

HYBRID LIFT PIN

A lift pin and a substrate support assembly and reactor including the lift pin are disclosed. The lift pin includes first section comprising a material having a first transparency and a second sectioncomprising a material having a second transparency. The lift pin can provide improved temperature un...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ROKKAM UDAY KIRAN, HILL ERIC
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A lift pin and a substrate support assembly and reactor including the lift pin are disclosed. The lift pin includes first section comprising a material having a first transparency and a second sectioncomprising a material having a second transparency. The lift pin can provide improved temperature uniformity across substrate support assembly including the lift pin during substrate processing. 公开了抬升销和包含所述抬升销的衬底支撑组合件和反应器。所述抬升销包含：第一区段，其包括具有第一透明度的材料；以及第二区段，其包括具有第二透明度的材料。在衬底处理期间，所述抬升销可以改进包含所述抬升销的衬底支撑组合件上的温度均匀性。