Forward-mounted substrate positioning device and substrate loading method

The invention provides a forward-mounted substrate positioning device and a substrate loading method, and relates to the technical field of film coating. The forward-mounted substrate positioning device comprises a substrate board, a press plate and connection parts; the connection parts comprise ex...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LU ZHANGWU, XU YONGJUN, XU ZHENGCHI, HUANG MIN, LI GONGJIAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a forward-mounted substrate positioning device and a substrate loading method, and relates to the technical field of film coating. The forward-mounted substrate positioning device comprises a substrate board, a press plate and connection parts; the connection parts comprise extending parts and boss parts; the extending parts are connected with the substrate board; the boss parts are connected with the ends, away from the substrate board, of the extending parts; the press plate is provided with first through grooves and film coating through holes; the first through grooves and the film coating through holes are arranged at intervals; the connection parts are inserted into the first through grooves; the first through grooves comprise first end groove parts and first diameter groove parts; the first end groove parts communicate with the first diameter groove parts; the first end grooves parts and the first diameter groove parts penetrate through the press plate respectively; the groove wid