Wafer type gap detection sensor for detecting a gap of the wafer chamber

The present invention relates to a wafer type gap detection sensor for detecting a gap of a wafer chamber, comprising: a substrate housing formed in a wafer shape; an electrostatic sensor assembly including a first electrostatic sensor unit and a second electrostatic sensor unit that are mounted wit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM BECK SANG, HOIANG YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!