Nano-imprinting device capable of preparing complex microstructure

The invention discloses a nano-imprinting device capable of preparing a complex microstructure. A method comprises the steps of firstly, unwinding a substrate by an unwinding roller; applying photoresist to the substrate by a glue application roller; conveying the substrate to the lower part of the...

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Bibliographische Detailangaben
Hauptverfasser: ZHEMING ZHANG, GONGCHENG ZHENG, JINGPENG LI, DIANZHENG WANG, JIN ZHANG, ZISU XU, BIN FU, JIEQIONG LIN, KAITUO FENG, XINYU CANG, DEEN DAI, ZHENGFA YI, QUN ZHANG, YAN GU, MINGMING LU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a nano-imprinting device capable of preparing a complex microstructure. A method comprises the steps of firstly, unwinding a substrate by an unwinding roller; applying photoresist to the substrate by a glue application roller; conveying the substrate to the lower part of the imprinting device; heating the photoresist to a vitrification temperature by a heating roller; carrying out imprinting by an imprinting roller I, and then carrying out curing; removing a residual layer through an etching device; returning the substrate to the lower part of the imprinting device again, and then carrying out heating; rotating an imprinting roller II to the upper part of the photoresist subjected to the first-time imprinting by a rotating disc; carrying out imprinting by the imprinting roller II; and after imprinting by the imprinting roller II, repeating the steps until an imprinting roller III finishes imprinting, and winding the obtained substrate with the complex microstructure through a winding r