Hexagonal box-shaped three-dimensional detector and preparation method thereof

The invention discloses a hexagonal box-shaped three-dimensional detector and a preparation method thereof. The detector is composed of multiple arranged detection units. The appearance of each detection unit is hexagonal-prism-shaped. Each detection unit comprises a silicon substrate. A hollow shel...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI ZHENG, ZHANG YA, LIAO CHUAN, LU SHUNMAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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