Hexagonal box-shaped three-dimensional detector and preparation method thereof

The invention discloses a hexagonal box-shaped three-dimensional detector and a preparation method thereof. The detector is composed of multiple arranged detection units. The appearance of each detection unit is hexagonal-prism-shaped. Each detection unit comprises a silicon substrate. A hollow shell-shaped electrode is fixed on the silicon substrate. The shell-shaped electrode is filled with a detection substrate. A central collecting electrode is embedded in the middle of the top of the detection substrate. An oxide layer is adhered to the top of the shell-shaped electrode and the central collecting electrode. A metal layer is adhered to the top of the detection substrate. The prepared detector has the advantages of low junction capacitance and signal noise, small dead zone ratio, no mutual interference between current signals and high position resolution and energy resolution of the detector. The electric field inside the detector is uniformly distributed, the particles can be incident on both sides, the w