Disc resonant gyro based on optical waveguide, and processing and packaging method thereof

The invention discloses a disc resonant gyro based on an optical waveguide, and a processing and packaging method thereof. The disc resonant gyro comprises a SOI structure and a glass cap which are bonded with each other, wherein the SOI structure comprises a silicon device layer, a silicon dioxide insulation layer and a silicon substrate layer from top to bottom; the central region of the silicon device layer is a circular anchor point, a circular groove structure is concentrically arranged on the periphery of the circular anchor point, optical structures are evenly distributed on the periphery of the circular groove structure, and each optical structure is externally provided with a corresponding electrode welding pad; a plurality of back through holes are formed in the silicon substrate layer; a circular groove is formed in the silicon dioxide insulating layer so that the circular groove is communicated with the back through holes; a cavity of the glass cap is formed in the centralregion of the back surfac