Regeneration cycle device of microetching liquid

The invention relates to a regeneration cycle device of microetching liquid. The regeneration cycle device comprises an etching waste liquid tank communicating with a microetching production line anda regeneration blending tank used for conveying the regenerated etching liquid to the microetching pr...

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Bibliographische Detailangaben
Hauptverfasser: CHEN YONGJIANG, LUO BAOKUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a regeneration cycle device of microetching liquid. The regeneration cycle device comprises an etching waste liquid tank communicating with a microetching production line anda regeneration blending tank used for conveying the regenerated etching liquid to the microetching production line. The etching waste liquid tank communicates with an electrolytic cell, and the electrolytic cell communicates with the regeneration blending tank. The regeneration cycle device of the microetching liquid adopts a direct electrolysis production process, the microetching waste liquid isdirectly added into the electrolytic cell for electrolysis, copper ions in waste liquid are separated, and a high-purity electrolytic copper plate is formed after electrode position; after the parameters of the electrolyte of which the concentration of the copper ions is reduced are adjusted, the electrolyte is returned to the microetching production line for use, and thus the cycling regeneration of the microetching wast