CRYOPUMP
The invention relates to a cryopump (1) which has a cylinder (8) that is covered by a cylinder head (5) and into which a cylinder running surface (9) is recessed, said running surface guiding a plunger (10). A pump working chamber (7) is recessed into the cylinder head (5), wherein the pump working...
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Format: | Patent |
Sprache: | chi ; eng |
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