CRYOPUMP
The invention relates to a cryopump (1) which has a cylinder (8) that is covered by a cylinder head (5) and into which a cylinder running surface (9) is recessed, said running surface guiding a plunger (10). A pump working chamber (7) is recessed into the cylinder head (5), wherein the pump working...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention relates to a cryopump (1) which has a cylinder (8) that is covered by a cylinder head (5) and into which a cylinder running surface (9) is recessed, said running surface guiding a plunger (10). A pump working chamber (7) is recessed into the cylinder head (5), wherein the pump working chamber is connected to a supply line (4), which conducts a medium, via an inlet valve (6), and thepump working chamber is fluidically connected to an outlet valve (11) that interacts with a pressure line (12). According to the invention, a cryopump (1) is provided which is improved with respect toits function, in particular with respect to the cooling process of the pump components. This is achieved in particular in that the supply line (4) has a branch (15) which is connected to a cooling line (14) that interacts with the cryopump (1) and in that the cooling line (14) is connected to the supply line (4) downstream of the branch (15) via a branch line (17) downstream of the interaction with the cryopump (1).
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