Organic film composition, organic film, and method for forming pattern
The present invention relates to an organic film composition, and provides an organic film composition comprising an aromatic ring compound, an additive containing a perfluoroalkyl group in the structure thereof, and a solvent, wherein the amount of fluorine (F) group contained in the additive is gr...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention relates to an organic film composition, and provides an organic film composition comprising an aromatic ring compound, an additive containing a perfluoroalkyl group in the structure thereof, and a solvent, wherein the amount of fluorine (F) group contained in the additive is greater than 0 and less than or equal to 30 wt% on the basis of the 100% total weight of the additive,and the rate of surface tension reduction of the additive, measured according to the following condition 1, is 0.1-30%. The definition of condition 1 is the same as that described in the specification.
本发明提供一种有机膜组成物、一种有机膜以及一种形成图案的方法。所述有机膜组成物包含芳香族环化合物、在所述结构中包含全氟烷基的添加剂及溶剂,其中以所述添加剂的总重量100%计,以0至30重量%的量包含所述添加剂中所包含的氟(F)基,且根据条件1所测量的所述添加剂的表面张力减小率为0.1%至30%。条件1的定义与在说明书中所定义的相同。 |
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