Silicon micro-resonator accelerometer bandwidth test system and method

The invention discloses a silicon micro-resonance accelerometer bandwidth test system, which comprises a phase-locked loop module formed by an exclusive OR phase detector, a second-order passive lead-lag loop filter and a voltage-controlled oscillator, a high-pass filter, an amplifying circuit, a fu...

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Bibliographische Detailangaben
Hauptverfasser: HUANG LIBIN, FAN SHUCONG, ZHANG JIQIANG, LI HONGSHENG, DING XUKAI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a silicon micro-resonance accelerometer bandwidth test system, which comprises a phase-locked loop module formed by an exclusive OR phase detector, a second-order passive lead-lag loop filter and a voltage-controlled oscillator, a high-pass filter, an amplifying circuit, a full-wave rectification circuit, a single-chip microcomputer and a display screen. The frequency modulation signal for acceleration dynamic test enters the exclusive OR phase detector, the signal is detected and demodulated by the phase-locked loop module, and after the second-order passive lead-lag output voltage of the loop filter passes across the high-pass filter, the amplifying circuit, and the full-wave rectifying circuit, the single-chip microcomputer performs AD sampling on the DC. Circuitbandwidth design and test are realized, the phase-locked loop demodulation mode is adopted, the use of expensive high-speed frequency measuring equipment is avoided, the cost is low, carrying is convenient, field debugging i