PbS colloidal quantum dot film surface acoustic wave gas sensor

The invention discloses a PbS colloidal quantum dot film surface acoustic wave gas sensor and a manufacturing method thereof, and belongs to the field of novel electronic materials and intelligent sensors. PbS CQDs are synthesized through a cation exchange method; an ST cut quartz crystal SAW delay...

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Bibliographische Detailangaben
Hauptverfasser: OU GUANWEN, MA SHAOMIN, LI MIN, FAN PING, LUO JINGTING, HONG RUITUO, FENG XIAOYING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a PbS colloidal quantum dot film surface acoustic wave gas sensor and a manufacturing method thereof, and belongs to the field of novel electronic materials and intelligent sensors. PbS CQDs are synthesized through a cation exchange method; an ST cut quartz crystal SAW delay line is manufactured by adopting a traditional photoetching process; the PbS CQDs are coated on thedelay region of the SAW delay line by using a spin-coating process; the surface acoustic wave gas sensor based on the PbS colloid quantum dot film is manufactured by combining the characteristics of higher specific surface area, easiness in gas adsorption and gas sensitivity of the PbS colloid quantum dot film with the advantages of small size, high sensitivity and the like of the surface acousticwave sensor. The dynamic sensing response of the sensor to gas with the NO2 concentration ranging from 0.5 ppm to 30 ppm at the room temperature is increased from 1 kHz to 12 kHz, the theoretical detection base limit of the s