TRANSFER FACILITY AND TRANSFER METHOD

A transfer facility (10) for transferring a cassette (90) to a vapor deposition device (80) is provided. The transfer facility (10) includes a cargo receiving base (30) and a transfer machine (20), wherein the cargo receiving base (30), the transfer machine (20), and a load port (83) of the vapor deposition device (80) are arranged at positions overlapping in a plan view. The transfer machine (20)is configured to move the cassette (90) up and down between the cargo receiving base (30) and the load port (83) of the vapor deposition device (80). The cargo receiving base (30) is configured to bein a vertical movement path of the cassette (90) when the cassette (90) is moved in or out relative to the cargo receiving base (30) by the transfer machine (20); and when the cassette (90) moves upand down through the transfer machine (20), the cargo receiving base (30) can move to a direction away from the vertical movement direction of the cassette (90). 一种移载设备(10)，其将箱子(90)向蒸镀装置(80)移载，该移载设备(10)具备承接台(30)和移载机(20)，承接台(30)