Programmable controller diffusion furnace control system and operation method

The invention discloses a diffusion furnace control system and an operation method thereof, and belongs to the technical field of semiconductor manufacturing equipment. The control system consists ofa diffusion furnace temperature control and gas flow control system with PLC (Programmable Logic Controller) as a core element, and various interlocked control main components required by the process.The method comprises the operation steps of process curve setting, manual operation, automatic operation, heating and cooling slope control, standby, maintaining in operation, manual jumping, intelligent PID control, historical curve checking, over-temperature detection alarm, communication fault detection, gas path flow detection alarm, gas path interlocking protection, system error correction and PID parameter self-setting. The system is novel in composition, clear in working principle, diverse in control function and convenient to operate, the temperature and the gas path state of the furnace body are displayed mor