Polycrystalline silicon reduction furnace sealing structure and method
The invention discloses a polycrystalline silicon reduction furnace sealing structure and method. The sealing structure comprises a reducing furnace base plate flange, a bell jar flange and a metal pad rings, wherein the metal pad rings are arranged between the reducing furnace base plate flange and...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a polycrystalline silicon reduction furnace sealing structure and method. The sealing structure comprises a reducing furnace base plate flange, a bell jar flange and a metal pad rings, wherein the metal pad rings are arranged between the reducing furnace base plate flange and the bell jar flange; the reducing furnace base plate flange and the bell jar flange are in oppositearrangement; screw bolt fixing holes are uniformly formed in the outer sides of the reducing furnace base plate flange and the bell jar flange oppositely; step type clamp tables are arranged on the inner sides of the reducing furnace base plate flange and the bell jar flange oppositely; pad ring grooves are formed among the reducing furnace base plate flange, the bell jar flange and the step typeclamp tables; the metal pad rings are positioned in the pad ring grooves; the metal pad rings are elastic; in the natural state, the width of the upper and lower ends of the metal pad rings is greater than the height of the p |
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