Lifetime prolonging device of ion pump of electron beam scanning measuring instrument and use method of lifetime prolonging device
The invention relates to a lifetime prolonging device of an ion pump of an electron beam scanning measuring instrument and a use method of the lifetime prolonging device. The lifetime prolonging device comprises a shell, an inner cavity of the shell is divided into multiple functional cavities throu...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a lifetime prolonging device of an ion pump of an electron beam scanning measuring instrument and a use method of the lifetime prolonging device. The lifetime prolonging device comprises a shell, an inner cavity of the shell is divided into multiple functional cavities through separation devices, and air cleaning devices are arranged in the functional cavities. The functional cavities comprise a sand blasting cavity, a cleaning cavity, a baking cavity and a testing cavity. A guide rail penetrating through all the functional cavities is arranged in the shell, and a vibration device and a fixed device are arranged on the guide rail. A sand blasting device is arranged in the sand blasting cavity. The cleaning cavity is provided with a cleaning device and a treatment opening. A temperate control device is arranged in the baking cavity, and the baking cavity is externally connected with a molecular pump and a primary vacuum pump. A vacuum simulating device and a high-voltage power source w |
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