High-sensitivity capacitive film vacuum gauge

The invention relates to a high-sensitivity capacitive film vacuum gauge. The high-sensitivity capacitive film vacuum gauge comprises a shell, a detection diaphragm and a fixed electrode plate, the interior of the shell is of a cavity structure, the detection diaphragm is fixed into the shell, and t...

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1. Verfasser: TANG YUNJIAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a high-sensitivity capacitive film vacuum gauge. The high-sensitivity capacitive film vacuum gauge comprises a shell, a detection diaphragm and a fixed electrode plate, the interior of the shell is of a cavity structure, the detection diaphragm is fixed into the shell, and the shell is internally divided into a vacuum chamber and a detection chamber. The fixed electrode plate is fixed in the vacuum chamber, the opposite faces of the fixed electrode plate and the detection diaphragm are concave cambered surfaces away from one side of the detection diaphragm, and a conductive material is plated on the curved surfaces, wherein the detection diaphragm is a movable electrode plate, and the movable electrode plate and the fixed electrode plate form a variable capacitor.Accordingly, the opposite faces of the fixed electrode plate and the detection diaphragm are designed to be the curved surfaces, the edge effect is greatly reduced, the effective area of the capacitoris greatly increased, the