Micro-cantilever beam array cyclic scanning system based on optical fiber channel

The invention relates to a micro-cantilever beam array cyclic scanning system based on optical fiber rotation bench. The system comprises a laser, an optical fiber, a laser head, a motor, a swing arm,an optical fiber channel, a micro-cantilever beam array, a substrate clamping bench, a photoelectric...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DING SONGNIAN, MEI YONGSONG, ZHANG FEI, LI SHIQIN, ZHENG SHIBANG, TANG YU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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