Micro-cantilever beam array cyclic scanning system based on optical fiber channel

The invention relates to a micro-cantilever beam array cyclic scanning system based on optical fiber rotation bench. The system comprises a laser, an optical fiber, a laser head, a motor, a swing arm,an optical fiber channel, a micro-cantilever beam array, a substrate clamping bench, a photoelectric position sensitive detector, a data acquisition card and a computer. The laser is connected to thelaser head through the optical fiber. The laser head is connected to the motor through the swing arm. The optical fiber channel is placed in front of the laser head. The micro-cantilever beam array is fixed on the substrate clamping bench. The inclined upper portion of the micro-cantilever beam array is provided with the photoelectric position sensitive detector. The photoelectric position sensitive detector is connected to a data acquisition card, and the data acquisition card is connected to the computer. The motor is used to drive the laser head on the swing arm to carry out a circular motion so that a laser beam a