Photosensitive imaging detection chip based on tip electron fluorescence excitation and preparation method thereof

The invention discloses a photosensitive imaging detection chip based on tip electronic fluorescence excitation. The photosensitive imaging detection chip comprises an optical antenna, a fluorescent film layer and a photosensitive array which are arranged in parallel, wherein the optical antenna is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG-TANG ANSU, ZHANG XINYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a photosensitive imaging detection chip based on tip electronic fluorescence excitation. The photosensitive imaging detection chip comprises an optical antenna, a fluorescent film layer and a photosensitive array which are arranged in parallel, wherein the optical antenna is of an array structure composed of a plurality of antenna elements which are arranged at intervals and electrically connected. The fluorescent film layer is of an array structure composed of a plurality of fluorescent film elements which are arranged at intervals and electrically connected. The photosensitive array is of an array structure composed of a plurality of photosensitive elements which are arranged at intervals. The optical antenna, the fluorescent film layer and the photosensitive array are the same in shape and array scale, the antenna elements of the optical antenna, the fluorescent film elements at the corresponding positions in the fluorescent film layer and the photosensitiveelements at the correspon