Sensing element and elastic sensitive element processing integrated sensor and preparation method thereof
The invention relates to a sensing element and elastic sensitive element processing integrated sensor, which comprises an elastic sensitive element, a sensing element and a resistance acquisition system. The sensing element is generated on the surface of the elastic sensitive element in situ, and at...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a sensing element and elastic sensitive element processing integrated sensor, which comprises an elastic sensitive element, a sensing element and a resistance acquisition system. The sensing element is generated on the surface of the elastic sensitive element in situ, and at least two parts of the sensing element are used as electrodes to be electrically connected with theresistance acquisition system respectively. The elastic sensitive element is of a three-dimensional structure, the elastic sensitive element comprises a carbonizable polymer layer at least arranged on one surface of the elastic sensitive element, and the sensing element is obtained by carbonizing a part of the carbonizable polymer layer. According to the invention, the sensing element is directlyprepared on the elastic sensitive element with the three-dimensional structure, and the elastic sensitive element and the sensing element do not need to be compounded by a complex method, so that theintegration of the design, |
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