Wafer container

The invention relates to a wafer container. A tray for holding a wafer is firmly fixed to a housing. A wafer carrier housing (Cs1) includes: a housing (Cs1a) as a cover; and a housing (Cs1b) that supports the housing (Cs1a). The housing (Cs1a) is provided with a wafer pressing part (X1). The wafer p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TERASAKI YOSHIAKI, MATSUMURA TAMIO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The invention relates to a wafer container. A tray for holding a wafer is firmly fixed to a housing. A wafer carrier housing (Cs1) includes: a housing (Cs1a) as a cover; and a housing (Cs1b) that supports the housing (Cs1a). The housing (Cs1a) is provided with a wafer pressing part (X1). The wafer pressing unit (X1) presses a part of the wafer tray (Tr1) such that the wafer tray (Tr1) holding thewafer W1 is fixed to the housing (Cs1b) via the wafer carrier (Cr1). 本发明涉及晶片容器。将对晶片进行保持的托盘牢固地固定于壳体。晶片载具壳体(Cs1)包含：作为盖的壳体(Cs1a)；以及壳体(Cs1b)，其对壳体(Cs1a)进行支撑。在壳体(Cs1a)设置有晶片按压部(X1)。晶片按压部(X1)对晶片托盘(Tr1)的一部分进行按压，以使对晶片W1进行保持的晶片托盘(Tr1)经由晶片载具(Cr1)而固定于壳体(Cs1b)。