Fabrication system, semiconductor process machine, and arc discharge protection method

A fabrication system includes a semiconductor process machine, a computation device and a FDC (fault detection and classification) system. The semiconductor process machine includes an electrode and an RF sensor to execute a semiconductor manufacturing process to fabricate an IC. The RF sensor wirelessly detects the intensity of the RF signal. The computation device extracts statistical characteristics based on the detection of the intensity of the RF signal. The FDC system determines whether or not the intensity of the RF signal meets a threshold value or a threshold range according to the extracted statistical characteristics. When the detected intensity of the RF signal exceeds the threshold value or the threshold range, the FDC system notifies the semiconductor process machine to adjust the RF signal or stop the semiconductor process machine to check part damage. 一种制造系统，包括半导体工艺机台、计算装置以及故障检测与分类系统。半导体工艺机台包括电极以及射频感测器以执行半导体制造程序来制造集成电路。射频感测器无线地感测射频信号的强度。计算装置基于所感测到的射频信号的强度提取统计特征值。故障检测与分类系统根据所提取的统计特征值确定射频信号的强度是否