SOLLER SLIT, X-RAY DIFFRACTION APPARATUS, AND METHOD

The invention provides a soller slit, an X-ray diffraction apparatus, and a method, capable of preventing the diffraction image on a detector from spreading in the in-plane direction even when an X-ray irradiation region spreads over the sample surface due to measurement by GIXD, thereby allowing fo...

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Hauptverfasser: KOBAYASHI SHINTARO, INNEMAN ADOLF, OMOTE KAZUHIKO, PINA LADISLAV
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a soller slit, an X-ray diffraction apparatus, and a method, capable of preventing the diffraction image on a detector from spreading in the in-plane direction even when an X-ray irradiation region spreads over the sample surface due to measurement by GIXD, thereby allowing for measurement with a short measurement time and a high resolution. The soller slit 100 includes a plurality of metallic thin plates 110, each being perpendicular to the bottom surface, which are arcuately arranged with a predetermined angular interval between each other so as to pass X-rays in a radiating direction from a particular focus, the soller slit 100 being provided to be used at a position through which X-rays diffracted on a sample surface pass, the particular focus being the center ofa goniometer circle, the X-rays being irradiated on a sample at an angle for GIXD. 本发明提供一种索勒狭缝、X射线衍射装置以及方法,即便在基于GIXD的测定中X射线照射区域在试料表面上展宽,检测器上的衍射像在面内方向也不会展宽,能够以短的测定时间且高的分辨率来进行测定。索勒狭缝(100)具备多个金属制的薄板(110),所述多个金属制的薄板(110)各自相对于底面垂