Fixed conductance component mass flow rate measuring device and method based on dynamic differential pressure attenuation

The invention discloses a fixed conductance component mass flow rate measuring device and method based on dynamic differential pressure attenuation. The mass flow rate measurement of an AAO fixed conductance component is accurate, efficient and simple. The device provided by the invention comprises an inflator, a first valve, a container A, a first thermometer, a differential pressure transmitter,a second valve, a third valve, the AAO fixed conductance component, a second thermometer, a container B, a fourth valve and a vacuum pump set. When pressure difference drives experimental gas to flowthrough the AAO fixed conductance component, an exponential function is fitted according to the attenuation variation of the inlet and outlet dynamic differential pressure of the AAO fixed conductance component with time, and then the transient mass flow rate of the gas flowing through the fixed conductance component is calculated. 本发明公开了一种基于动态差压衰减的固定流导元件质量流量测量装置及方法，使AAO固定流导元件的质量流量测量具有准确、高效和简便的特点。本发明装置包括：充气装置、第一阀门、容器A、第一温