REFRIGERATION MACHINE

The invention relates to a refrigeration machine, in particular a cryopump for generating a vacuum, having a compressor (10) for compressing a refrigerant substantially comprising helium and oil. Together with the compressor, an oil separator (20, 22, 24, 26) is arranged downstream in the delivery d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FISCHERBERNHARD, WALTER GERHARD WILHELM, ASHCROFT JENNIFER, KALISCH DIRK
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a refrigeration machine, in particular a cryopump for generating a vacuum, having a compressor (10) for compressing a refrigerant substantially comprising helium and oil. Together with the compressor, an oil separator (20, 22, 24, 26) is arranged downstream in the delivery direction of the coolant. The invention further relates to a cooling device (30) in which the refrigeration medium expands. In order to adsorb harmful gases, an adsorption device (28) is arranged upstream of the cooling device (30) in the delivery direction. 本发明涉及种制冷机,特别是用于产生真空的低温泵,其具有:用于压缩制冷剂的压缩机(10),制冷剂基本上包括氦气和油。与压缩机起,油分离器(20、22、24、26)被布置在冷却剂的递送方向上的下游。本发明进步涉及种冷却装置(30),制冷机在该冷却装置(30)中膨胀。为了吸附有害气体,吸附装置(28)被布置在冷却装置(30)在递送方向上的上游。