VACUUM ASSEMBLY FOR APPLYING THIN-FILM COATINGS AND METHOD FOR APPLYING OPTICAL COATINGS TO SAME

The group of inventions relates to a vacuum process assembly and to a method for applying thin-film coatings having given optical characteristics to same. The indicated vacuum assembly includes an airlock chamber which is affixed to a transport system and which is capable of moving with a vertically-disposed drum-type substrate-holder inside same or without same, and of docking with a process chamber by means of a horizontal high-vacuum shutter located under the process chamber. The application of thin-film optical coatings is carried out in working zones of the process chamber by means of chemical deposition in high-density plasma, wherein, the application of coatings involves a plasma generation system in which sources of induction discharge are disposed along a vertical axis, and the working space is divided into working zones by means of high-vacuum pumping means and protective screens. The invention allows for the compact disposition of equipment and for a high-performance and economical method of applyi