Mask plate and manufacturing method thereof

The invention provides a mask plate and a manufacturing method of the mask plate and belongs to the technical field of display. The evaporation mask plate comprises an opening part corresponding to atleast one area to be evaporated and a shielding part corresponding to a non-evaporation region other...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	ZHAI ZHONGYUAN, ZENG WANGMING, YUAN PENGCHENG, WANG YONGMAO, ZHANG WENCHANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention provides a mask plate and a manufacturing method of the mask plate and belongs to the technical field of display. The evaporation mask plate comprises an opening part corresponding to atleast one area to be evaporated and a shielding part corresponding to a non-evaporation region other than the region to be evaporated. Diversion grooves are formed in the surface of the shielding part. By the adoption of the technical scheme, the situation that liquid medicine is remained on the mask plate after cleaning can be prevented. 本发明提供了种掩膜板及其制作方法，属于显示技术领域。其中，蒸镀掩膜板，包括：开口部，对应于至少个待蒸镀区域；遮挡部，对应于所述待蒸镀区域之外的非蒸镀区域；所述遮挡部的表面设置有导流槽。本发明的技术方案能够防止掩膜板在清洗后残留药液。