Pressure sensor capsule

Pressure sensor capsule includes a capsule main part, an isolator, a pressure sensor and a fluid-filled passageway. The capsule main part defines a process chamber. The isolator is supported and is exposed in the process chamber by the capsule main part. The pressure sensor produces the sensor output, and the pressure in the inner chamber is represented by the sensor output, and the inner cavity is separated from the process chamber by the isolator. The fluid-filled passageway extends to the inner chamber from the process chamber. 压力传感器封壳包括封壳主体，隔离器，压力传感器和流体填充通道。封壳主体限定了处理腔。隔离器由封壳主体支撑并暴露于处理腔。压力传感器产生传感器输出，该传感器输出表示内腔中的压力，该内腔通过隔离器与处理腔隔离。流体填充通道从处理腔延伸到内腔。