DEVICE INSPECTION CIRCUIT, DEVICE INSPECTION DEVICE, AND PROBE CARD

Provided is a device inspection circuit capable of measuring the current flowing through multiple devices without raising cost. A power supply circuit 27 of a box-side inspection circuit 21 is provided with an operational amplifier 29 and a sense resistor 30; connects, in series and in the following order, a power supply 25 having a current measurement function, the operational amplifier 29, the sense resistor 30, and a DUT 26; and connects the power supply 25 to the non-inverting input terminal of the operational amplifier 29. Further, the power supply circuit 27 is provided with a negative feedback path 32 for applying the voltage between the sense resistor 30 and DUT 26 to the inverting input terminal of the operational amplifier 29 and a positive feedback path 34 for connecting an upstream sense point 33 between the operational amplifier 29 and the sense resistor 30 to the non-inverting input terminal of the operational amplifier 29. The positive feedback path 34 has a feedback resistor 35. 本发明提供种不增加成本而能够