Micromechanical gyroscope with low temperature coefficient

The invention discloses a micromechanical gyroscope with low temperature coefficient. The invention adopts a three-frame full decoupling structure. The structure comprises a drive frame, a mass blockand a detection frame sequentially nested. The drive frame and an external anchor point are coupled by an external drive folding beam. The drive frame and the mass block are coupled by an external detection folding beam. The mass block and the detection frame are coupled by an internal drive folding beam. The detection frame and an internal anchor point are coupled by an internal folding beam. Drive teeth are evenly distributed on the drive frame. Drive detection teeth are distributed at the four corners of the drive frame, and are symmetrically distributed along a vertical center line and a horizontal center line, respectively. Detection comb teeth are distributed inside the detection frame and are divided into positive integer multiples of two groups, each group consisting of two pairs of comb teeth of the same