Method for preparing visible light to near-infrared light detector with space omnidirectional detection

The invention provides a method for preparing a visible light to near-infrared light detector with space omnidirectional detection. The method comprises the steps of (A) preparing a visible light to near-infrared light planar single-tube array based on an epitaxial wafer, (B) preparing a rigid subst...

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Hauptverfasser:	XU YUN, ZHANG LIN'AO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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