Method for preparing visible light to near-infrared light detector with space omnidirectional detection
The invention provides a method for preparing a visible light to near-infrared light detector with space omnidirectional detection. The method comprises the steps of (A) preparing a visible light to near-infrared light planar single-tube array based on an epitaxial wafer, (B) preparing a rigid subst...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a method for preparing a visible light to near-infrared light detector with space omnidirectional detection. The method comprises the steps of (A) preparing a visible light to near-infrared light planar single-tube array based on an epitaxial wafer, (B) preparing a rigid substrate with a metal electrode, (C) overturning and welding the planar single-tube array prepared in step (A) to the rigid substrate with the metal electrode, (D) folding the rigid substrate into a 3D shape by the action of a mechanical external force, and (E) leading the metal electrode of the rigid substrate out and packaging the metal electrode, and preparing the visible light to near-infrared light detector with space omnidirectional detection. The detector prepared by the method has superior adaptability to a complex environment and can detect wave bands of visible light and near-infrared light, and the full-scale monitoring of a target can be achieved without mechanical scanning under thepremise of ensuring high |
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