VERTICAL HALL-EFFECT SENSOR FOR DETECTING TWO-DIMENSIONAL IN-PLANE MAGNETIC FIELDS

The invention relates to a vertical hall-effect sensor for detecting two-dimensional in-plane magnetic fields. In one embodiment, a disclosed microelectronic device (100) includes a vertical Hall plate (108) with a cross-shaped upper terminal (110) and a lower terminal which includes a buried layer (118). The cross-shaped upper terminal (110) has a length-to-width ratio of 5 to 12 where it contacts the vertical Hall plate (108). The length is measured from one end of one arm of the cross-shaped upper terminal (110) to an opposite end of an opposite arm. The width is an average width of both arms. Hall sense taps (122) are located outside of the cross-shaped upper terminal (110). A current return region (120) is connected to the buried layer (118). 本公开涉及种用于检测二维平面内磁场的垂直霍尔效应传感器。在个实施方案中，所述公开的微电子装置(100)包含垂直霍尔板(108)，其具有十字形上部终端(110)和包含埋层(118)的下部终端。所述十字形上部终端(110)在其中接触所述垂直霍尔板(108)之处具有5比12的长宽比。所述长度是从所述十字形上部终端(110)的个臂的端到相对臂的相对端测量的。所述宽度是两个臂的平均宽度。霍尔感测分接头(122)位于所述十字形上部终端(110)外。电流返回区域(120)连接到所述埋层(118)。