Sputtering machine oil temperature heater

The invention discloses a sputtering machine oil temperature heater. The sputtering machine oil heater comprises a mica thermal insulating disc, heating tubes, a base, and a driving line arranged in the base; a plurality of curve slots are formed in the mice thermal heating disc, the heating tubes are arranged in the curve slots along the slots; two ends of the heating tube are connected with binding posts at two ends of the curve slots; the heating tube comprises bowl-type ceramic tube and the electric resistance wire therein; the binding post comprises a ceramic sealing shell and an electricpile located in the ceramic sealing shell and electrically connected with the driving line; the electric resistance wire is electrically connected with the electric pile; and the bowl-type ceramic tube is hermetically connected with the ceramic sealing shell. By adopting the mica thermal insulating disc, the bowl-type ceramic tube and the ceramic sealing shell are hermetically connected at the binding part, the oil tempe