CF/Si3N4 (carbon fiber/silicon nitride) composite material crucible upper of monocrystalline silicon drawing furnace and preparation method thereof
The invention discloses a CF/Si3N4 (carbon fiber/silicon nitride) composite material crucible upper of a monocrystalline silicon drawing furnace and a preparation method thereof. The composite material crucible upper is characterized by being prepared from the following components in percentage by w...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a CF/Si3N4 (carbon fiber/silicon nitride) composite material crucible upper of a monocrystalline silicon drawing furnace and a preparation method thereof. The composite material crucible upper is characterized by being prepared from the following components in percentage by weight: 60 to 70% of carbon fiber cloth, 25 to 40% of ceramic impregnating liquid, and 10 to 15% of pyrolysis carbon; the components are fired at high temperature, so as to obtain the CF/Si3N4 composite material crucible upper. The CF/Si3N4 composite material crucible upper has the advantages that the content of carbon fiber is high, and the content of pyrolysis carbon is low; the certain content of ceramic components (silicon nitride, silicon carbide and the like) is contained, and the strengthand anti-silicon corrosion property are further improved.
本发明公开了种单晶硅拉制炉的CF/SiN复合材料埚帮及其制备方法。关键是复合材料埚帮的组分组成是(按重量百分比计算):炭纤维布60~70%;陶瓷浸渍液25~40%;热解炭10~15%;经高温烧制得所述的CF/SiN复合材料埚帮。本发明具有较高的炭纤维含量和较低的热解炭含量,同时含有定量的氮化硅、碳化硅等陶瓷成分,进步提高了强度和抗硅 |
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