High-precision two-dimensional worktable Z-axis error compensating method and system thereof

The invention discloses a high-precision two-dimensional worktable Z-axis error compensating method and a system thereof, wherein the Z-axis error compensating device comprises a capacitor displacement sensor (602) and a reference surface (604). The compensating device is used in cooperation with a...

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Hauptverfasser: CHEN LIANGZHOU, GAN RUNLIN, DAI JIANG, WANG XIANGYANG
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creator CHEN LIANGZHOU
GAN RUNLIN
DAI JIANG
WANG XIANGYANG
description The invention discloses a high-precision two-dimensional worktable Z-axis error compensating method and a system thereof, wherein the Z-axis error compensating device comprises a capacitor displacement sensor (602) and a reference surface (604). The compensating device is used in cooperation with a two-dimensional worktable, wherein the reference surface (604) is used for being set in a target area of the two-dimensional worktable. The capacitor displacement sensor (602) is used for obtaining the displacement of the reference surface (604) in a Z-axis direction through detecting the distance between the capacitor displacement sensor (602) and the reference surface (604). The displacement is the Z-axis error at the target area caused by the two-dimensional worktable, thereby compensating the Z-axis error of the two-dimensional worktable based on the displacement. According to the method and the system, through improving the principle of the Z-axis error compensating method and a means for measuring the Z-axis
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subjects HAND TOOLS
MANIPULATORS
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PERFORMING OPERATIONS
PHYSICS
PORTABLE POWER-DRIVEN TOOLS
STORAGE MEANS FOR WORKSHOPS
TESTING
TRANSPORTING
WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK
title High-precision two-dimensional worktable Z-axis error compensating method and system thereof
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