High-precision two-dimensional worktable Z-axis error compensating method and system thereof

The invention discloses a high-precision two-dimensional worktable Z-axis error compensating method and a system thereof, wherein the Z-axis error compensating device comprises a capacitor displacement sensor (602) and a reference surface (604). The compensating device is used in cooperation with a two-dimensional worktable, wherein the reference surface (604) is used for being set in a target area of the two-dimensional worktable. The capacitor displacement sensor (602) is used for obtaining the displacement of the reference surface (604) in a Z-axis direction through detecting the distance between the capacitor displacement sensor (602) and the reference surface (604). The displacement is the Z-axis error at the target area caused by the two-dimensional worktable, thereby compensating the Z-axis error of the two-dimensional worktable based on the displacement. According to the method and the system, through improving the principle of the Z-axis error compensating method and a means for measuring the Z-axis