Liquid material discharging device and liquid material discharging method
The present invention provides a liquid discharging device capable of suppressing a long startup time of a device. A discharging portion includes a supply port for supplying the liquid material, a discharging port for discharging the liquid material supplied from the supply port, and an exhausting p...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention provides a liquid discharging device capable of suppressing a long startup time of a device. A discharging portion includes a supply port for supplying the liquid material, a discharging port for discharging the liquid material supplied from the supply port, and an exhausting port for discharging the liquid material that is not discharged. A control device controls in such amanner that the first control amount depending on the meniscus pressure of the liquid material in the discharging port and the second control amount depending on the differential pressure between thepressure of the exhausting port and the pressure of the discharging port are maintained at the target value of the first control amount, that is, the first target value and the target value of the second control amount, that is, the second target value. The control device has a function of giving priority to the control in which the first control amount is closer to the first target value than thecontrol in which the secon |
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