SEMICONDUCTOR DEVICE WITH A CZ SEMICONDUCTOR BODY AND METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE WITH A CZ SEMICONDUCTOR BODY

A method of manufacturing a semiconductor device includes reducing an oxygen concentration in a first part of a CZ semiconductor body by a thermal treatment. The first part adjoins a first surface ofthe semiconductor body. The semiconductor body is processed on the first surface. A thickness of the...

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Bibliographische Detailangaben
Hauptverfasser: SCHULZE HANS-JOACHIM, SUSITI ALEXANDER, OEFNER HELMUT, WUBBEN THOMAS
Format: Patent
Sprache:chi ; eng
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