Anti-reflection film and production method thereof

The present invention provides an anti-reflection film and a production method thereof. The production method comprises: providing a substrate and a solvent, wherein the solvent is volatile and water-soluble; producing an anti-reflection film on the surface of the substrate, wherein the anti-reflect...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHONG PENGGENG, ZHANG MENGFEI, ZHOU JIE, SHEN QIMIAO, WENG ZEPING, WANG YONGGUANG, LI PAN, SHENG XIAOYI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention provides an anti-reflection film and a production method thereof. The production method comprises: providing a substrate and a solvent, wherein the solvent is volatile and water-soluble; producing an anti-reflection film on the surface of the substrate, wherein the anti-reflection film is mist-mass-like; making the anti-reflection film contact the volatile matter of the solvent, and eliminating the mist mass on the surface of the substrate; and carrying out annealing solidifying on the substrate and the anti-reflection film after the mist mass eliminating. With the production method of the present invention, the mist-mass-like anti-reflection film contacts the volatile matter of the water-soluble solvent to eliminate the mist-mass-like anti-reflection film so as to improve the light transmittance of the anti-reflection film on the substrate, wherein the mist-mass-like anti-reflection film can be treated by the anti-reflection film production method, such that thestrict humidity and the t